① Aluminum oxide is an important type of oxide ceramic, widely used in precision components of semiconductor equipment, wafer polishing processes, aerospace fields, automotive industry, and medical device industry, etc.
② Depending on the crystal structure, aluminum oxide can be divided into α-alumina, β-alumina, γ-alumina, and δ-alumina.
③ Currently, the purity of aluminum oxide ceramics on the market generally includes 95%, 99%, 99.5%, 99.7%, 99.9%, and 99.99%. For example, the highest purity aluminum oxide ceramic targets are used in the preparation process of semiconductor integrated circuit chips.