Iron-cobalt-tantalum alloy is an alloy composed of iron, cobalt and tantalum, the target shape is usually round, and the deposition of the film layer is an important soft magnetic layer material for vertical magnetic recording medium. Since the alloy material contains a large amount of tantalum, segregation will occur during the solidification process, which does not help to deposit a film with uniform composition, and we use a unique fast cooling process to obtain an alloy target with fine grains and uniform composition. In order to ensure the purity of the material and reduce the number of inclusions, the high-purity stable crucible and high-vacuum melting technology are adopted to ensure the purity of the material, improve the mechanical properties of the material, and avoid the cracking of the target during use.